Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062831 | Carboxyl-containing lactone compound, polymer, resist composition, and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeshi Kinsho, Seiichiro Tachibana, Takeru Watanabe | 2011-11-22 |