Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083507 | Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft | Tea-Jin Park, Kwang-Myung Lee, Sang-Gon Lee | 2011-12-27 |
| 7985297 | Method of cleaning a quartz part | Jung-Dae Park, Pil-Kwon Jun, Bo-yong Lee, Tae-Hyo Choi, Da-Hee Lee | 2011-07-26 |
| 7976785 | Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus | Sang-Gon Lee, In Ju Lee, Kyoung-hye Lee, Yong Hee Lee, Jin-ok Jung +1 more | 2011-07-12 |
| 7951653 | Methods of manufacturing a semiconductor device using compositions for etching copper | Jung-Dae Park, Da-Hee Lee, Pil-Kwon Jun, Kwang-Shin Lim | 2011-05-31 |
| 7879736 | Composition for etching silicon oxide and method of forming a contact hole using the same | Dong Won Hwang, Kook-Joo Kim, Jung In La, Pil-Kwon Jun, Yang-Koo Lee | 2011-02-01 |
| 7880138 | Apparatus and method for analyzing contaminants on wafer | Jae Seok Lee, Heung Bin Lim, Won Ryu, Yang-Koo Lee, Hun-Jung Yi | 2011-02-01 |