Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043974 | Semiconductor wet etchant and method of forming interconnection structure using the same | Young-Sub You, Tae-Hyo Choi, Hun-Jung Yi, Kun-Hyung Lee | 2011-10-25 |
| 7985297 | Method of cleaning a quartz part | Pil-Kwon Jun, Bo-yong Lee, Tae-Hyo Choi, Da-Hee Lee, Seung-Ki Chae | 2011-07-26 |
| 7951653 | Methods of manufacturing a semiconductor device using compositions for etching copper | Da-Hee Lee, Seung-Ki Chae, Pil-Kwon Jun, Kwang-Shin Lim | 2011-05-31 |
| 7943562 | Semiconductor substrate cleaning methods, and methods of manufacture using same | Da-Hee Lee, Hun-Jung Yi, Tae-Hyo Choi | 2011-05-17 |