Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985297 | Method of cleaning a quartz part | Jung-Dae Park, Pil-Kwon Jun, Bo-yong Lee, Tae-Hyo Choi, Seung-Ki Chae | 2011-07-26 |
| 7951653 | Methods of manufacturing a semiconductor device using compositions for etching copper | Jung-Dae Park, Seung-Ki Chae, Pil-Kwon Jun, Kwang-Shin Lim | 2011-05-31 |
| 7943562 | Semiconductor substrate cleaning methods, and methods of manufacture using same | Jung-Dae Park, Hun-Jung Yi, Tae-Hyo Choi | 2011-05-17 |