Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985297 | Method of cleaning a quartz part | Jung-Dae Park, Bo-yong Lee, Tae-Hyo Choi, Da-Hee Lee, Seung-Ki Chae | 2011-07-26 |
| 7951653 | Methods of manufacturing a semiconductor device using compositions for etching copper | Jung-Dae Park, Da-Hee Lee, Seung-Ki Chae, Kwang-Shin Lim | 2011-05-31 |
| 7879736 | Composition for etching silicon oxide and method of forming a contact hole using the same | Dong Won Hwang, Kook-Joo Kim, Jung In La, Seung-Ki Chae, Yang-Koo Lee | 2011-02-01 |