Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027017 | Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath | Ju-A Ryu, Jeong-Heung Kong, Hun-Hwan Ha, Yo-Han Ahn, Hweon Jin +1 more | 2011-09-27 |
| 7879736 | Composition for etching silicon oxide and method of forming a contact hole using the same | Dong Won Hwang, Kook-Joo Kim, Jung In La, Pil-Kwon Jun, Seung-Ki Chae | 2011-02-01 |
| 7880138 | Apparatus and method for analyzing contaminants on wafer | Jae Seok Lee, Heung Bin Lim, Won Ryu, Seung-Ki Chae, Hun-Jung Yi | 2011-02-01 |