Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027017 | Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath | Jeong-Heung Kong, Yang-Koo Lee, Hun-Hwan Ha, Yo-Han Ahn, Hweon Jin +1 more | 2011-09-27 |
| 7914594 | Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same | Chang Min Cho, Joo Young Kim, Ji-Young Kim, Yo-Han Ahn, Hyung Choi +1 more | 2011-03-29 |