Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003543 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Han-ku Cho, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2011-08-23 |
| 7998874 | Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same | Hak-Sun Lee, Myeong-Cheol Kim, Kyung-yub Jeon, Ji-Young Lee | 2011-08-16 |
| 7892982 | Method for forming fine patterns of a semiconductor device using a double patterning process | Doo-Youl Lee, Pan-Suk Kwak, Sung-Gon Jung, Jung-hyeon Lee, Suk-Joo Lee +1 more | 2011-02-22 |
| 7862988 | Method for forming patterns of semiconductor device | Yool Kang, Sang-Gyun Woo, Seok-Hwan Oh, Gi-Sung Yeo, Ji-Young Lee | 2011-01-04 |