Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003543 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Cha-Won Koh, Han-ku Cho, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2011-08-23 |