Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062981 | Method of forming pattern using fine pitch hard mask | Ji-Young Lee, Sang-Gyun Woo | 2011-11-22 |
| 8034684 | Semiconductor device with improved overlay margin and method of manufacturing the same | — | 2011-10-11 |
| 8003543 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Cha-Won Koh, Han-ku Cho, Jeong-Lim Nam, Gi-Sung Yeo, Ji-Young Lee | 2011-08-23 |
| 7879726 | Methods of forming semiconductor devices using selective etching of an active region through a hardmask | Heung-Sik Park, Jun Ho Yoon, Cheol-Kyu Lee | 2011-02-01 |