Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988874 | Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same | Jeong Yun Lee, Ken Tokashiki, Kyoung-Sub Shin, Hong Cho | 2011-08-02 |
| 7879726 | Methods of forming semiconductor devices using selective etching of an active region through a hardmask | Heung-Sik Park, Cheol-Kyu Lee, Joon-soo Park | 2011-02-01 |