Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988874 | Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same | Jeong Yun Lee, Ken Tokashiki, Kyoung-Sub Shin, Jun Ho Yoon | 2011-08-02 |
| 7897512 | Methods of forming integrated circuit devices including a multi-layer structure with a contact extending therethrough | Seung-Pil Chung, Dong-Seok Lee | 2011-03-01 |