Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988874 | Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same | Jeong Yun Lee, Kyoung-Sub Shin, Jun Ho Yoon, Hong Cho | 2011-08-02 |