Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892982 | Method for forming fine patterns of a semiconductor device using a double patterning process | Doo-Youl Lee, Pan-Suk Kwak, Sung-Gon Jung, Suk-Joo Lee, Cha-Won Koh +1 more | 2011-02-22 |