Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892982 | Method for forming fine patterns of a semiconductor device using a double patterning process | Doo-Youl Lee, Pan-Suk Kwak, Jung-hyeon Lee, Suk-Joo Lee, Cha-Won Koh +1 more | 2011-02-22 |
| 7873935 | Method of manufacturing a mask | Ji-Young Lee, Han-ku Cho, Gi-Sung Yeo | 2011-01-18 |