Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026044 | Method of forming fine patterns of semiconductor device | Doo-Youl Lee, Han-ku Cho, Gi-Sung Yeo, Pan-Suk Kwak, Min Jong Hong | 2011-09-27 |
| 7940373 | Compensating masks, multi-optical systems using the masks, and methods of compensating for 3-D mask effect using the same | Sung-soo Suh, Han-ku Cho, Yong-jin Chun, Sung Woo Lee, Young-Chang Kim | 2011-05-10 |
| 7892982 | Method for forming fine patterns of a semiconductor device using a double patterning process | Doo-Youl Lee, Pan-Suk Kwak, Sung-Gon Jung, Jung-hyeon Lee, Cha-Won Koh +1 more | 2011-02-22 |