Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7940373 | Compensating masks, multi-optical systems using the masks, and methods of compensating for 3-D mask effect using the same | Suk-Joo Lee, Han-ku Cho, Yong-jin Chun, Sung Woo Lee, Young-Chang Kim | 2011-05-10 |
| 7900170 | System and method correcting optical proximity effect using pattern configuration dependent OPC models | Young-Seog Kang, Han-ku Cho, Sang-Gyun Woo | 2011-03-01 |