Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7900170 | System and method correcting optical proximity effect using pattern configuration dependent OPC models | Sung-soo Suh, Han-ku Cho, Sang-Gyun Woo | 2011-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7900170 | System and method correcting optical proximity effect using pattern configuration dependent OPC models | Sung-soo Suh, Han-ku Cho, Sang-Gyun Woo | 2011-03-01 |