Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Chris Gage, Sheldon Templeton | 2011-11-08 |
| 8033769 | Loadlock designs and methods for using same | Chris Gage, Sheldon Templeton, Keith Wood, Damon Tyrone Genetti | 2011-10-11 |
| 7960297 | Load lock design for rapid wafer heating | Michael Rivkin, Ron Powell, Michael Nordin | 2011-06-14 |