Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Chris Gage, Shawn M. Hamilton | 2011-11-08 |
| 8033769 | Loadlock designs and methods for using same | Chris Gage, Shawn M. Hamilton, Keith Wood, Damon Tyrone Genetti | 2011-10-11 |