Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Chris Gage, Shawn M. Hamilton, Sheldon Templeton | 2011-11-08 |
| 7960297 | Load lock design for rapid wafer heating | Michael Rivkin, Ron Powell, Shawn M. Hamilton | 2011-06-14 |