Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960297 | Load lock design for rapid wafer heating | Ron Powell, Shawn M. Hamilton, Michael Nordin | 2011-06-14 |
| 7941039 | Pedestal heat transfer and temperature control | Krishnan Shrinivasan, Stephen V. Gentile, Peter J. Woytowitz, Sassan Roham, George D. Kamian | 2011-05-10 |