Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960297 | Load lock design for rapid wafer heating | Michael Rivkin, Shawn M. Hamilton, Michael Nordin | 2011-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960297 | Load lock design for rapid wafer heating | Michael Rivkin, Shawn M. Hamilton, Michael Nordin | 2011-06-14 |