Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8060252 | High throughput method of in transit wafer position correction in system using multiple robots | Damon Tyrone Genetti | 2011-11-15 |
| 8052419 | Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation | Michael Nordin, Shawn M. Hamilton, Sheldon Templeton | 2011-11-08 |
| 8033769 | Loadlock designs and methods for using same | Shawn M. Hamilton, Sheldon Templeton, Keith Wood, Damon Tyrone Genetti | 2011-10-11 |