Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075701 | Processes for reconditioning multi-component electrodes | Armen Avoyan, Yan Fang, Duane Outka, Stephen Whitten | 2011-12-13 |
| 8075703 | Immersive oxidation and etching process for cleaning silicon electrodes | Armen Avoyan, Duane Outka, Catherine Zhou | 2011-12-13 |
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Armen Avoyan, John Daugherty | 2011-09-20 |
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Qian Fu, Tuochuan Huang, Raphael Casaes, Duane Outka | 2011-07-12 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Yaobo Yin, Jason Augustino, Catherine Zhou, Armen Avoyan | 2011-05-17 |