Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075703 | Immersive oxidation and etching process for cleaning silicon electrodes | Armen Avoyan, Duane Outka, Hong Shih | 2011-12-13 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Yaobo Yin, Jason Augustino, Armen Avoyan | 2011-05-17 |