Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075701 | Processes for reconditioning multi-component electrodes | Armen Avoyan, Yan Fang, Hong Shih, Stephen Whitten | 2011-12-13 |
| 8075703 | Immersive oxidation and etching process for cleaning silicon electrodes | Armen Avoyan, Catherine Zhou, Hong Shih | 2011-12-13 |
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Qian Fu, Tuochuan Huang, Raphael Casaes | 2011-07-12 |