Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Tuochuan Huang, Raphael Casaes, Duane Outka | 2011-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976641 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Tuochuan Huang, Raphael Casaes, Duane Outka | 2011-07-12 |