Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075701 | Processes for reconditioning multi-component electrodes | Yan Fang, Duane Outka, Hong Shih, Stephen Whitten | 2011-12-13 |
| 8075703 | Immersive oxidation and etching process for cleaning silicon electrodes | Duane Outka, Catherine Zhou, Hong Shih | 2011-12-13 |
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Hong Shih, John Daugherty | 2011-09-20 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Yaobo Yin, Jason Augustino, Catherine Zhou | 2011-05-17 |