Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Armen Avoyan, Hong Shih | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Armen Avoyan, Hong Shih | 2011-09-20 |