Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029716 | Amorphous nitride release layers for imprint lithography, and method of use | Frances Anne Houle, Simone Raoux, Stephen M. Rossnagel | 2011-10-04 |
| 8008095 | Methods for fabricating contacts to pillar structures in integrated circuits | Solomon Assefa, Gregory Costrini, Michael J. Rooks, Jonathan Zanhong Sun | 2011-08-30 |
| 7943412 | Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters | Leena Paivikki Buchwalter, Kevin K. Chan, Timothy J. Dalton, Jennifer Lund, Kevin S. Petrarca +2 more | 2011-05-17 |
| 7883919 | Negative thermal expansion system (NTEs) device for TCE compensation in elastomer compsites and conductive elastomer interconnects in microelectronic packaging | Gareth G. Hougham, S. Jay Chey, James P. Doyle, Xiao Hu Liu, Paul A. Lauro +2 more | 2011-02-08 |
| 7863070 | Methods for encapsulating microelectromechanical (MEM) devices on a wafer scale | Evan G. Colgan, Bruce K. Furman | 2011-01-04 |