Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048796 | Microstructure device including a metallization structure with self-aligned air gaps formed based on a sacrificial material | Thomas Werner | 2011-11-01 |
| 8039398 | Method of reducing non-uniformities during chemical mechanical polishing of excess metal in a metallization level of microstructure devices | Frank Feustel, Juergen Boemmels | 2011-10-18 |
| 7928004 | Nano imprint technique with increased flexibility with respect to alignment and feature shaping | Carsten Peters, Frank Feustel | 2011-04-19 |
| 7875514 | Technique for compensating for a difference in deposition behavior in an interlayer dielectric material | Ralf Richter, Carsten Peters | 2011-01-25 |