Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048811 | Method for patterning a metallization layer by reducing resist strip induced damage of the dielectric material | Frank Feustel, Thomas Werner | 2011-11-01 |
| 8039398 | Method of reducing non-uniformities during chemical mechanical polishing of excess metal in a metallization level of microstructure devices | Frank Feustel, Robert Seidel | 2011-10-18 |