Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062414 | Coating liquid for forming amorphous silica-based coating film with low dielectric constant | Miki Egami, Michio Komatsu, Yoshihiro Nakata, Ei Yano, Katsumi Suzuki | 2011-11-22 |
| 7998567 | Coating liquid for formation of protective film for semiconductor processing and method for preparation of the same | Miki Egami, Hiroki Arao, Michio Komatsu | 2011-08-16 |
| 7901652 | Method of producing porous silica-based particles | Kazuaki Inoue, Kazuhiro Nakayama | 2011-03-08 |
| 7902039 | Method for manufacturing silicon wafer | Shinichi Tomita, Masao Yoshimuta, Yasuyuki Hashimoto | 2011-03-08 |
| 7896115 | Fuel cell vehicle | Tohru Ono, Takayuki Ogawa, Shujiro Nozaki, Takashi Kato, Takaharu Sato +3 more | 2011-03-01 |