Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062414 | Coating liquid for forming amorphous silica-based coating film with low dielectric constant | Akira Nakashima, Miki Egami, Michio Komatsu, Yoshihiro Nakata, Katsumi Suzuki | 2011-11-22 |
| 8057986 | Method for forming resist pattern and method for manufacturing a semiconductor device | Junichi Kon | 2011-11-15 |
| 7985700 | Composition for forming insulating film and method for fabricating semiconductor device | Shirou Ozaki, Yoshihiro Nakata | 2011-07-26 |
| 7928536 | Roughness reducing film at interface, materials for forming roughness reducing film at interface, wiring layer and semiconductor device using the same, and method for manufacturing semiconductor device | Tadahiro Imada, Yoshihiro Nakata | 2011-04-19 |