Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062414 | Coating liquid for forming amorphous silica-based coating film with low dielectric constant | Akira Nakashima, Miki Egami, Yoshihiro Nakata, Ei Yano, Katsumi Suzuki | 2011-11-22 |
| 8029898 | Inorganic compound particle | Toshiharu Hirai, Hiroyasu Nishida | 2011-10-04 |
| 7998567 | Coating liquid for formation of protective film for semiconductor processing and method for preparation of the same | Miki Egami, Hiroki Arao, Akira Nakashima | 2011-08-16 |