Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062414 | Coating liquid for forming amorphous silica-based coating film with low dielectric constant | Akira Nakashima, Miki Egami, Michio Komatsu, Ei Yano, Katsumi Suzuki | 2011-11-22 |
| 7985700 | Composition for forming insulating film and method for fabricating semiconductor device | Shirou Ozaki, Ei Yano | 2011-07-26 |
| 7928536 | Roughness reducing film at interface, materials for forming roughness reducing film at interface, wiring layer and semiconductor device using the same, and method for manufacturing semiconductor device | Tadahiro Imada, Ei Yano | 2011-04-19 |
| 7909701 | Power transmission apparatus | Keiji Ishikawa, Yasuo Tabuchi, Michiyasu Nosaka, Takayuki Suzuki | 2011-03-22 |
| 7875981 | Insulating film material, multilayer interconnection structure, method for manufacturing same, and method for manufacturing semiconductor device | Yasushi Kobayashi, Shirou Ozaki | 2011-01-25 |