Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062414 | Coating liquid for forming amorphous silica-based coating film with low dielectric constant | Akira Nakashima, Michio Komatsu, Yoshihiro Nakata, Ei Yano, Katsumi Suzuki | 2011-11-22 |
| 7998567 | Coating liquid for formation of protective film for semiconductor processing and method for preparation of the same | Hiroki Arao, Akira Nakashima, Michio Komatsu | 2011-08-16 |