Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026491 | Charged particle beam apparatus and method for charged particle beam adjustment | Takeshi Ogashiwa, Mitsugu Sato, Atsushi Takane, Toshihide Agemura, Yuusuke Narita +3 more | 2011-09-27 |
| 7902039 | Method for manufacturing silicon wafer | Masao Yoshimuta, Yasuyuki Hashimoto, Akira Nakashima | 2011-03-08 |