Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018664 | Housing structure | Stefan Xalter, Peter Deufel, Yim-Bun Patrick Kwan, Bernard Stommen, Herman Soemers +1 more | 2011-09-13 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken +1 more | 2011-01-11 |