Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072700 | Optical apparatus for use in photolithography | Erik Roelof Loopstra | 2011-12-06 |
| 8065103 | Calibration of a position measuring device of an optical device | — | 2011-11-22 |
| 8018664 | Housing structure | Stefan Xalter, Peter Deufel, Bernard Stommen, Herman Soemers, Franz Van Deuren +1 more | 2011-09-13 |
| 7995884 | Device consisting of at least one optical element | Michael Muehlbeyer, Johannes Lippert | 2011-08-09 |
| 7986472 | Optical element module | Jens Kugler, Ulrich Weber, Bernhard Gellrich, Peter Deufel | 2011-07-26 |
| 7940392 | Lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2011-05-10 |
| 7929227 | Optical assembly | Hermann Bieg, Karl-Eugen Aubele, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2011-04-19 |