Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7995884 | Device consisting of at least one optical element | Yim-Bun Patrick Kwan, Michael Muehlbeyer | 2011-08-09 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7944628 | Optical element unit | — | 2011-05-17 |