Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Erich Merz, Raoul Reiner, Klaus Rief +10 more | 2011-06-14 |
| 7929227 | Optical assembly | Hermann Bieg, Yim-Bun Patrick Kwan, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2011-04-19 |