Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035903 | Positioning unit and alignment device for an optical element | Jens Kugler | 2011-10-11 |
| 8027024 | Replacement device for an optical element | Bernhard Gellrich | 2011-09-27 |
| 7986472 | Optical element module | Jens Kugler, Bernhard Gellrich, Yim-Bun Patrick Kwan, Peter Deufel | 2011-07-26 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |