Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085027 | Quasi-resonant systems and methods with multi-mode control | Yuan Lin, Lieyi Fang | 2011-12-27 |
| 8065636 | System and method for creating a focus-exposure model of a lithography process | Yu Cao, Luoqi Chen, Hua-Yu Liu | 2011-11-22 |
| 8057967 | Process window signature patterns for lithography process control | Moshe E. Preil, Xun Chen, Shauh-Teh Juang, James Wiley | 2011-11-15 |
| 8056028 | Method of performing mask-writer tuning and optimization | Yu Cao, James Wiley | 2011-11-08 |
| 7999920 | Method of performing model-based scanner tuning | Yu Cao | 2011-08-16 |
| 7898237 | System and method for power controller | Yunqi Shao, Yuan Lin, Lieyi Fang | 2011-03-01 |
| 7882480 | System and method for model-based sub-resolution assist feature generation | Yu Cao, Hanying Feng | 2011-02-01 |
| 7873937 | System and method for lithography simulation | Yen-Wen Lu, Yu Cao, Luoqi Chen, Xun Chen | 2011-01-18 |