Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065636 | System and method for creating a focus-exposure model of a lithography process | Jun Ye, Yu Cao, Hua-Yu Liu | 2011-11-22 |
| 7873937 | System and method for lithography simulation | Jun Ye, Yen-Wen Lu, Yu Cao, Xun Chen | 2011-01-18 |