Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057967 | Process window signature patterns for lithography process control | Jun Ye, Moshe E. Preil, Shauh-Teh Juang, James Wiley | 2011-11-15 |
| 7873937 | System and method for lithography simulation | Jun Ye, Yen-Wen Lu, Yu Cao, Luoqi Chen | 2011-01-18 |