Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057967 | Process window signature patterns for lithography process control | Jun Ye, Moshe E. Preil, Xun Chen, Shauh-Teh Juang | 2011-11-15 |
| 8056028 | Method of performing mask-writer tuning and optimization | Yu Cao, Jun Ye | 2011-11-08 |