Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057967 | Process window signature patterns for lithography process control | Jun Ye, Moshe E. Preil, Xun Chen, James Wiley | 2011-11-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057967 | Process window signature patterns for lithography process control | Jun Ye, Moshe E. Preil, Xun Chen, James Wiley | 2011-11-15 |