Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065636 | System and method for creating a focus-exposure model of a lithography process | Jun Ye, Yu Cao, Luoqi Chen | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065636 | System and method for creating a focus-exposure model of a lithography process | Jun Ye, Yu Cao, Luoqi Chen | 2011-11-22 |